| Citation: |
Sui Xiaohong, Zhang Ruoxin, Pei Weihua, Lu Lin, Chen Hongda. Fabrication of a Silicon-Based Microprobe for Neural Interface Applications[J]. Journal of Semiconductors, 2006, 27(10): 1703-1706.
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Sui X H, Zhang R X, Pei W H, Lu L, Chen H D. Fabrication of a Silicon-Based Microprobe for Neural Interface Applications[J]. Chin. J. Semicond., 2006, 27(10): 1703.
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Fabrication of a Silicon-Based Microprobe for Neural Interface Applications
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Abstract
A two-dimensional (2D) multi-channel silicon-based microelectrode array is developed for recording neural signals.Three photolithographic masks are utilized in the fabrication process.SEM images show that the microprobe is 1.2mm long,100μm wide,and 30μm thick,with recording sites spaced 200μm apart for good signal isolation.For the individual recording sites,the characteristics of impedance versus frequency are shown by in vitro testing.The impedance declines from 14MΩ to 1.9kΩ as the frequency changes from 0 to 10MHz.A compatible PCB (print circuit board) aids in the less troublesome implantation and stabilization of the microprobe.-
Keywords:
- microelectrode array,
- neural interface,
- MEMS
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References
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Proportional views
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