| Citation: |
Xu Jingbo, Zhao Yulong, Jiang Zhuangde, Zhang Dacheng, Yang Fang, Sun Jian. Fabrication of Monolithic Silicon Multi-Sensor on SOI Wafer[J]. Journal of Semiconductors, 2007, 28(2): 302-307.
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Xu J B, Zhao Y L, Jiang Z D, Zhang D C, Yang F, Sun J. Fabrication of Monolithic Silicon Multi-Sensor on SOI Wafer[J]. Chin. J. Semicond., 2007, 28(2): 302.
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Fabrication of Monolithic Silicon Multi-Sensor on SOI Wafer
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Abstract
A monolithic silicon multi-sensor on SOI wafer that consists of a three-axis piezoresistive accelerometer,a piezoresistive absolute pressure sensor,and a silicon thermistor temperature sensor is presented.The fabrication process of the sensor is described.An effective micromachining process is developed to improve the reliability of the metal wire in the multi-sensor and to avoid adhesion between the PYREX glass and silicon mass in the process of anodic bonding.Finally,the measurement results of the sensor are shown.-
Keywords:
- monolithic multi-sensor,
- SOI,
- MEMS
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References
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Proportional views
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