Citation: |
江炳尧, 沈鸿烈, 周祖尧, 夏冠群. 低能Si~+离子注入GaAs材料的沟道效应和射程分布[J]. 半导体学报(英文版), 1993, 14(4): 217-223.
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Received: 20 August 2015 Revised: Online: Published: 01 April 1993
Citation: |
江炳尧, 沈鸿烈, 周祖尧, 夏冠群. 低能Si~+离子注入GaAs材料的沟道效应和射程分布[J]. 半导体学报(英文版), 1993, 14(4): 217-223.
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