Chin. J. Semicond. > 2003, Volume 24 > Issue 5 > 528-533
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F-I类比方法及MEMS梁的等效电路宏模型

戎华 , 黄庆安 and 李伟华

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Key words: 等效电路宏模型, F-I类比, 模态分析, 拉格朗日方程

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    Received: 20 August 2015 Revised: Online: Published: 01 May 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(5): 528-533
      戎华, 黄庆安, 李伟华. F-I类比方法及MEMS梁的等效电路宏模型[J]. 半导体学报(英文版), 2003, 24(5): 528-533.
      Citation:
      戎华, 黄庆安, 李伟华. F-I类比方法及MEMS梁的等效电路宏模型[J]. 半导体学报(英文版), 2003, 24(5): 528-533.
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      • Received Date: 2015-08-20

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