Chin. J. Semicond. > 2003, Volume 24 > Issue 3 > 298-306
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双电测组合法测试半导体电阻率的研究

宿昌厚 and 鲁效明

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Key words: 双电测组合四探针法, 方块电阻, 电阻率

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    Received: 20 August 2015 Revised: Online: Published: 01 March 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(3): 298-306
      宿昌厚, 鲁效明. 双电测组合法测试半导体电阻率的研究[J]. 半导体学报(英文版), 2003, 24(3): 298-306.
      Citation:
      宿昌厚, 鲁效明. 双电测组合法测试半导体电阻率的研究[J]. 半导体学报(英文版), 2003, 24(3): 298-306.
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      • Received Date: 2015-08-20

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