Chin. J. Semicond. > 1984, Volume 5 > Issue 5 > 569-572
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掺氧多晶硅薄膜的组分分析

王云珍 , 陈心和 and 李月珍

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    Received: 20 August 2015 Revised: Online: Published: 01 May 1984

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      Article Navigation >  Journal of Semiconductors  > 1984  >  5(5): 569-572
      王云珍, 陈心和, 李月珍. 掺氧多晶硅薄膜的组分分析[J]. 半导体学报(英文版), 1984, 5(5): 569-572.
      Citation:
      王云珍, 陈心和, 李月珍. 掺氧多晶硅薄膜的组分分析[J]. 半导体学报(英文版), 1984, 5(5): 569-572.
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      • Received Date: 2015-08-20

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