Chin. J. Semicond. > 1990, Volume 11 > Issue 10 > 759-767
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单晶晶胞参数的X射线双晶衍射测定方法

李润身 and 朱南昌

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    许晓燕, 谭静荣, 黄如, 张兴. 氮注入多晶硅栅对超薄SiO_2栅介质性能的影响[J]. 半导体学报(英文版), 2003, 24(1): 76-79.
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    Received: 19 August 2015 Revised: Online: Published: 01 October 1990

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      Article Navigation >  Journal of Semiconductors  > 1990  >  11(10): 759-767
      许晓燕, 谭静荣, 黄如, 张兴. 氮注入多晶硅栅对超薄SiO_2栅介质性能的影响[J]. 半导体学报(英文版), 2003, 24(1): 76-79.
      Citation:
      李润身, 朱南昌. 单晶晶胞参数的X射线双晶衍射测定方法[J]. 半导体学报(英文版), 1990, 11(10): 759-767.
      shu

      • Received Date: 2015-08-19

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