Chin. J. Semicond. > 2003, Volume 24 > Issue 2 > 216-220
|

CONTENTS

AlN薄膜室温直接键合技术

门传玲 , 徐政 , 安正华 , 吴雁军 and 林成鲁

+ Author Affiliations

PDF

Key words: AlN薄膜, 智能剥离, 绝缘层上硅

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2531 Times PDF downloads: 948 Times Cited by: 0 Times

    History

    Received: 20 August 2015 Revised: Online: Published: 01 February 2003

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2003  >  24(2): 216-220
      门传玲, 徐政, 安正华, 吴雁军, 林成鲁. AlN薄膜室温直接键合技术[J]. 半导体学报(英文版), 2003, 24(2): 216-220.
      Citation:
      门传玲, 徐政, 安正华, 吴雁军, 林成鲁. AlN薄膜室温直接键合技术[J]. 半导体学报(英文版), 2003, 24(2): 216-220.
      shu

      • Received Date: 2015-08-20

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return