Chin. J. Semicond. > 2005, Volume 26 > Issue 7 > 1454-1458
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SiO2/Si波导应力双折射数值分析

安俊明 , 班士良 , 梁希侠 , 李健 , 郜定山 , 夏君磊 , 李健光 , 王红杰 and 胡雄伟

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Key words: SiO2/Si, 波导, 应力, 双折射, 数值分析

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    Received: 18 August 2015 Revised: Online: Published: 01 July 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(7): 1454-1458
      安俊明, 班士良, 梁希侠, 李健, 郜定山, 夏君磊, 李健光, 王红杰, 胡雄伟. SiO2/Si波导应力双折射数值分析[J]. 半导体学报(英文版), 2005, 26(7): 1454-1458.
      Citation:
      安俊明, 班士良, 梁希侠, 李健, 郜定山, 夏君磊, 李健光, 王红杰, 胡雄伟. SiO2/Si波导应力双折射数值分析[J]. 半导体学报(英文版), 2005, 26(7): 1454-1458.
      shu

      • Received Date: 2015-08-18

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