Chin. J. Semicond. > 1981, Volume 2 > Issue 2 > 117-127
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差示光谱法测定硅中的氧和碳

许振嘉 , 江德生 , 宋春英 , 孙伯康 and 刘江夏

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    Received: 20 August 2015 Revised: Online: Published: 01 February 1981

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      Article Navigation >  Journal of Semiconductors  > 1981  >  2(2): 117-127
      许振嘉, 江德生, 宋春英, 孙伯康, 刘江夏. 差示光谱法测定硅中的氧和碳[J]. 半导体学报(英文版), 1981, 2(2): 117-127.
      Citation:
      许振嘉, 江德生, 宋春英, 孙伯康, 刘江夏. 差示光谱法测定硅中的氧和碳[J]. 半导体学报(英文版), 1981, 2(2): 117-127.
      shu

      • Received Date: 2015-08-20

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