Chin. J. Semicond. > 2002, Volume 23 > Issue 6 > 571-576
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高温处理对镍诱导晶化硅上的薄膜晶体管性能的影响(英文)

秦明 , 樊路加 , VincentPoon and C Y Yuen

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Key words: 镍诱导横向晶化, 薄膜晶体管, 高温处理

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    Received: 19 August 2015 Revised: Online: Published: 01 June 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(6): 571-576
      秦明, 樊路加, VincentPoon, C Y Yuen. 高温处理对镍诱导晶化硅上的薄膜晶体管性能的影响(英文)[J]. 半导体学报(英文版), 2002, 23(6): 571-576.
      Citation:
      秦明, 樊路加, VincentPoon, C Y Yuen. 高温处理对镍诱导晶化硅上的薄膜晶体管性能的影响(英文)[J]. 半导体学报(英文版), 2002, 23(6): 571-576.
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      • Received Date: 2015-08-19

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