Chin. J. Semicond. > 1991, Volume 12 > Issue 11 > 673-678
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用于制备SOI材料的RF-ZMR技术研究

张鹏飞 , 钱佩信 , 林惠旺 and 柳连俊

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1991

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      Article Navigation >  Journal of Semiconductors  > 1991  >  12(11): 673-678
      张鹏飞, 钱佩信, 林惠旺, 柳连俊. 用于制备SOI材料的RF-ZMR技术研究[J]. 半导体学报(英文版), 1991, 12(11): 673-678.
      Citation:
      张鹏飞, 钱佩信, 林惠旺, 柳连俊. 用于制备SOI材料的RF-ZMR技术研究[J]. 半导体学报(英文版), 1991, 12(11): 673-678.
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      • Received Date: 2015-08-19

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