Chin. J. Semicond. > 2002, Volume 23 > Issue 6 > 609-613
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用于微波/射频集成电路的一种新型低损耗介质——多孔硅及氧化多孔硅厚膜

龙永福 , 朱自强 , 赖宗声 , 忻佩胜 and 石艳玲

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Key words: 微波/射频, 多孔硅/氧化多孔硅, 介质膜, 损耗

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    Received: 19 August 2015 Revised: Online: Published: 01 June 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(6): 609-613
      龙永福, 朱自强, 赖宗声, 忻佩胜, 石艳玲. 用于微波/射频集成电路的一种新型低损耗介质——多孔硅及氧化多孔硅厚膜[J]. 半导体学报(英文版), 2002, 23(6): 609-613.
      Citation:
      龙永福, 朱自强, 赖宗声, 忻佩胜, 石艳玲. 用于微波/射频集成电路的一种新型低损耗介质——多孔硅及氧化多孔硅厚膜[J]. 半导体学报(英文版), 2002, 23(6): 609-613.
      shu

      • Received Date: 2015-08-19

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