Yang Fengfan, Fang Liang, Li Li, Fu Guangzong, Zhang Yong, Li Mingwei and Yu Jiangtao
Abstract: Cdln2O4(CIo)thin films was prepared by direct-current (DC) reactive magnetron sputtering from a Cd.In alloy target in an Ar and O2 atmosphere.The surface morphology and structure of the CIO thin film were analyzed by AFM，XRD，chemistry composition and element valence state of it were analyzed bv XPS.Both the Seebeck effect of CIO thin film and Seebeck effect under magnetic field have been investigated.The results indicate that the CIO thin film is crvstaUine structure，its surface roughness is 1.6～2.6nm，with the crystalline size being 13～36nm and very clear grain dary.The CIO thin film consists of CIO phase and In2O3 phase，some samples still contain minimal CdO phase，Cd，In，O and C element are included in CIO thin film which is in oxygen.deficient state，the electrical property of thin film is improved. Seebeck effect is very striking；thermoelectromotive force increases linearly with the increase of differential temperature，the thermo-electromotive power decreases with the increase of resistance；the thermoelectromotive power of the thin film decreases under magnetic field. The relationship between preparing conditions and structure and the mechanism of Seebeck effect no magnetic field and under magnetic field are explored in detail.
Key words: transparent and conductive CIO thin film, structure, Seebeck effect, thermoelectromotive power
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Received: 27 May 2016 Revised: Online: Published: 01 January 2007
| Citation: |
Yang Fengfan, Fang Liang, Li Li, Fu Guangzong, Zhang Yong, Li Mingwei, Yu Jiangtao. Structure and Seebeck Effect for Transparent and Conductive CdIn2O4 Thin Film[J]. Journal of Semiconductors, 2007, 28(S1): 67-75.
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Yang F F, Fang L, Li L, Fu G Z, Zhang Y, Li M W, Yu J T. Structure and Seebeck Effect for Transparent and Conductive CdIn2O4 Thin Film[J]. Chin. J. Semicond., 2007, 28(S1): 67.
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