Chin. J. Semicond. > 1997, Volume 18 > Issue 6 > 441-447
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适合硅微机械系统(MEMS)的集成驱动结构──铝硅双金属膜片

战长青 , 罗台秦 , 刘理天 and 钱佩信

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    Received: 19 August 2015 Revised: Online: Published: 01 June 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(6): 441-447
      战长青, 罗台秦, 刘理天, 钱佩信. 适合硅微机械系统(MEMS)的集成驱动结构──铝硅双金属膜片[J]. 半导体学报(英文版), 1997, 18(6): 441-447.
      Citation:
      战长青, 罗台秦, 刘理天, 钱佩信. 适合硅微机械系统(MEMS)的集成驱动结构──铝硅双金属膜片[J]. 半导体学报(英文版), 1997, 18(6): 441-447.
      shu

      • Received Date: 2015-08-19

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