PAPERS
Chen Qinghua, Wu Wengang, Wang Ziqian, Yan Guizhen and Hao Yilong
Abstract: This paper reports on the design,fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS (micro-electro-mechanical system) 16×16 optical switches.The mirror in the array can enlarge its rotation angles up to 90. and keep a steady state to steer the optical signal.According to the large-rotation behavior,an electro-mechanical model of the mirror is presented.By monolithic integration of fiber grooves and mirrors fabricated by a surface and bulk hybrid micromachining process,the coarse passive alignment of fiber-mirror-fiber can be achieved.The reflectivity of the mirror is measured to be 93.1%~96.3%.The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2.1dB using OptiFocusTM collimating lensed fibers.Moreover,only about ±0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5~90Hz in the vertical vibration amplitude of 3mm.
Key words: optical switch, micro-mirror array, large rotation, electrostatic actuation, MEMS
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Article views: 3034 Times PDF downloads: 976 Times Cited by: 0 Times
Received: 18 August 2015 Revised: 19 April 2008 Online: Published: 01 August 2008
| Citation: |
Chen Qinghua, Wu Wengang, Wang Ziqian, Yan Guizhen, Hao Yilong. A 16×16 Micro Mirror Array for Optical Switches[J]. Journal of Semiconductors, 2008, 29(8): 1496-1503.
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Chen Q H, Wu W G, Wang Z Q, Yan G Z, Hao Y L. A 16×16 Micro Mirror Array for Optical Switches[J]. J. Semicond., 2008, 29(8): 1496.
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