Chin. J. Semicond. > 2003, Volume 24 > Issue 1 > 24-28
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纳米电子束曝光(英文)

刘明 , 陈宝钦 , 王云翔 and 张建宏

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Key words: 电子束曝光系统, 分辨率, 套刻精度

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    Received: 20 August 2015 Revised: Online: Published: 01 January 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(1): 24-28
      刘明, 陈宝钦, 王云翔, 张建宏. 纳米电子束曝光(英文)[J]. 半导体学报(英文版), 2003, 24(1): 24-28.
      Citation:
      刘明, 陈宝钦, 王云翔, 张建宏. 纳米电子束曝光(英文)[J]. 半导体学报(英文版), 2003, 24(1): 24-28.
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      • Received Date: 2015-08-20

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