Chin. J. Semicond. > 2002, Volume 23 > Issue 4 > 362-366
|

CONTENTS

使用超声搅拌实现精密KOH各向异性体硅腐蚀

陈兢 , 刘理天 , 李志坚 , 谭智敏 , 蒋前哨 , 方华军 , 徐扬 and 刘燕翔

+ Author Affiliations

PDF

Key words: MEMS, 各向异性腐蚀, 超声搅拌, KOH, 表面粗糙度, 均匀性, 腐蚀速率

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2756 Times PDF downloads: 1304 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 April 2002

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2002  >  23(4): 362-366
      陈兢, 刘理天, 李志坚, 谭智敏, 蒋前哨, 方华军, 徐扬, 刘燕翔. 使用超声搅拌实现精密KOH各向异性体硅腐蚀[J]. 半导体学报(英文版), 2002, 23(4): 362-366.
      Citation:
      陈兢, 刘理天, 李志坚, 谭智敏, 蒋前哨, 方华军, 徐扬, 刘燕翔. 使用超声搅拌实现精密KOH各向异性体硅腐蚀[J]. 半导体学报(英文版), 2002, 23(4): 362-366.
      shu

      • Received Date: 2015-08-19

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return