Chin. J. Semicond. > 1984, Volume 5 > Issue 5 > 516-522
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稀释气体对GD淀积a-Si:H膜的光电性质的影响

马洪磊 , 曹宝成 , 李淑英 and 陆大荣

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    Received: 20 August 2015 Revised: Online: Published: 01 May 1984

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      Article Navigation >  Journal of Semiconductors  > 1984  >  5(5): 516-522
      马洪磊, 曹宝成, 李淑英, 陆大荣. 稀释气体对GD淀积a-Si:H膜的光电性质的影响[J]. 半导体学报(英文版), 1984, 5(5): 516-522.
      Citation:
      马洪磊, 曹宝成, 李淑英, 陆大荣. 稀释气体对GD淀积a-Si:H膜的光电性质的影响[J]. 半导体学报(英文版), 1984, 5(5): 516-522.
      shu

      • Received Date: 2015-08-20

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