Chin. J. Semicond. > 1998, Volume 19 > Issue 8 > 625-630
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IC缺陷轮廓的盒维数及其方向的分布特征

姜晓鸿 , 郝跃 and 徐国华

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    Received: 18 August 2015 Revised: Online: Published: 01 August 1998

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      Article Navigation >  Journal of Semiconductors  > 1998  >  19(8): 625-630
      姜晓鸿, 郝跃, 徐国华. IC缺陷轮廓的盒维数及其方向的分布特征[J]. 半导体学报(英文版), 1998, 19(8): 625-630.
      Citation:
      姜晓鸿, 郝跃, 徐国华. IC缺陷轮廓的盒维数及其方向的分布特征[J]. 半导体学报(英文版), 1998, 19(8): 625-630.
      shu

      • Received Date: 2015-08-18

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