Citation: |
王弘英, 刘玉岭, 郝景晨, 魏碧华. ULSI制备中铜布线的两步抛光技术[J]. 半导体学报(英文版), 2003, 24(4): 433-437.
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Key words: 铜, 阻挡层, 两步抛光, ULSI, 多层布线
Article views: 2576 Times PDF downloads: 1447 Times Cited by: 0 Times
Received: 20 August 2015 Revised: Online: Published: 01 April 2003
Citation: |
王弘英, 刘玉岭, 郝景晨, 魏碧华. ULSI制备中铜布线的两步抛光技术[J]. 半导体学报(英文版), 2003, 24(4): 433-437.
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