Citation: |
Shao Lexi, Liu Xiaoping, Hwang Hueyliang. SEM Investigation on Influences of ZnS/CuInS2/Mo/SL-Glass Substrate on RF Sputtered ZnO∶Al Films[J]. Journal of Semiconductors, 2005, 26(S1): 49-51.
****
Shao L X, Liu X P, Hwang H. SEM Investigation on Influences of ZnS/CuInS2/Mo/SL-Glass Substrate on RF Sputtered ZnO∶Al Films[J]. Chin. J. Semicond., 2005, 26(13): 49.
|
SEM Investigation on Influences of ZnS/CuInS2/Mo/SL-Glass Substrate on RF Sputtered ZnO∶Al Films
-
Abstract
Zinc oxide doped with aluminum (ZnO∶Al) thin films are prepared on ZnS/CuInS2/Mo/soda-lime glass substrates by using radio frequency magnitron sputtering technique with ceramics ZnO∶Al2O3 as the target under the same deposition conditions at 200℃.The influences of growth parameters of the ZnS and CuInS2 layers on the deposited ZnO∶Al film surface morphology are investigated by SEM.The results show that increase of the sulfur content whether from ZnS or CuInS2 results in crystallinity quality raising and that increasing metal content in the sublayers will improve the uniformity of the deposited ZnO∶Al films. -
References
-
Proportional views