Chin. J. Semicond. > 1997, Volume 18 > Issue 10 > 731-733
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硅基纳米SiC的制备及其微结构分析

李宁生 , 鲍希茂 , 廖良生 , 吴晓华 , 高义华 and 张泽

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    Received: 19 August 2015 Revised: Online: Published: 01 October 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(10): 731-733
      李宁生, 鲍希茂, 廖良生, 吴晓华, 高义华, 张泽. 硅基纳米SiC的制备及其微结构分析[J]. 半导体学报(英文版), 1997, 18(10): 731-733.
      Citation:
      李宁生, 鲍希茂, 廖良生, 吴晓华, 高义华, 张泽. 硅基纳米SiC的制备及其微结构分析[J]. 半导体学报(英文版), 1997, 18(10): 731-733.
      shu

      • Received Date: 2015-08-19

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