Citation: |
Li Rengang, Huang Qing'an, Li Weihua. Temperature Analysis of Electrothermal Microactuators with a Nodal Analysis Model Built Based on the Weighted Residue Method[J]. Journal of Semiconductors, 2006, 27(10): 1880.
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Li R G, Huang Q, Li W H. Temperature Analysis of Electrothermal Microactuators with a Nodal Analysis Model Built Based on the Weighted Residue Method[J]. Chin. J. Semicond., 2006, 27(10): 1880.
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Temperature Analysis of Electrothermal Microactuators with a Nodal Analysis Model Built Based on the Weighted Residue Method
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Abstract
This paper develops a nodal analysis model of in-plane electrothermal microactuators with the Galerkin method based on the weighted residue method.With high accuracy,easy modeling,and clear configuration,the model makes it possible to co-simulate with the control circuit,which means it can simulate the whole system with the electrothermal microactuators.The model is verified by simulation with ANSYS and agrees well with it. -
References
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