Chin. J. Semicond. > 2004, Volume 25 > Issue 11 > 1442-1446
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快速热退火对Ti/Al-GaN接触的影响

李雪 , 亢勇 , 陈江峰 , 李向阳 , 龚海梅 and 方家熊

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Key words: 俄歇能谱深度分布, 欧姆接触, 势垒高度, 隧穿电流

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    Received: 19 August 2015 Revised: Online: Published: 01 November 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(11): 1442-1446
      李雪, 亢勇, 陈江峰, 李向阳, 龚海梅, 方家熊. 快速热退火对Ti/Al-GaN接触的影响[J]. 半导体学报(英文版), 2004, 25(11): 1442-1446.
      Citation:
      李雪, 亢勇, 陈江峰, 李向阳, 龚海梅, 方家熊. 快速热退火对Ti/Al-GaN接触的影响[J]. 半导体学报(英文版), 2004, 25(11): 1442-1446.
      shu

      • Received Date: 2015-08-19

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