Chin. J. Semicond. > 2001, Volume 22 > Issue 8 > 1093-1096

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ULSI铜互连线技术中的电镀工艺

张国海 , 钱鹤 , 夏洋 , 王文泉 and 龙世兵

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Key words: 集成电路, 铜互连, 电镀

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    Received: 20 August 2015 Revised: Online: Published: 01 August 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(8): 1093-1096
      张国海, 钱鹤, 夏洋, 王文泉, 龙世兵. ULSI铜互连线技术中的电镀工艺[J]. 半导体学报(英文版), 2001, 22(8): 1093-1096.
      Citation:
      张国海, 钱鹤, 夏洋, 王文泉, 龙世兵. ULSI铜互连线技术中的电镀工艺[J]. 半导体学报(英文版), 2001, 22(8): 1093-1096.
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      • Received Date: 2015-08-20

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