Enhancement of Light Extraction of LED by Photonic Crystal Structures

Du Wei; Xu Xingsheng; Sun Zenghui; Lu Lin; Gao Junhua; Zhao Zhimin; Wang Chunxia; Chen Hongda

Chin. J. Semicond. > 2006, Volume 27 > Issue 5 > 921-925

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Enhancement of Light Extraction of LED by Photonic Crystal Structures

Du Wei, Xu Xingsheng, Sun Zenghui, Lu Lin, Gao Junhua, Zhao Zhimin, Wang Chunxia and Chen Hongda

State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China

Abstract: The band structure of a 2D infinite photonic crystal is calculated using the FDTD method.Slab photonic crystals with InP are fabricated.Two fabrication methods--one using only PMMA as mask and one using PMMA and SiO2 as masks are used.The results show that the first method cannot yield an accurate pattern transfer,while the other method can.The extraction efficiency in an LED is enhanced successfully by use of the photonic crystal.The light extraction efficiency of the LED with the photonic crystal structure is twice as high as that of the unprocessed sample under the same testing conditions.Along with the increase of lattice constant,the extraction efficiency also increases.

Key words: photonic crystal, electron beam lithography, RIE, LED extraction efficiency

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Du Wei, Xu Xingsheng, Sun Zenghui, Lu Lin, Gao Junhua, Zhao Zhimin, Wang Chunxia, Chen Hongda. Enhancement of Light Extraction of LED by Photonic Crystal Structures[J]. Journal of Semiconductors, 2006, 27(5): 921-925.

Du W, Xu X S, Sun Z H, Lu L, Gao J H, Zhao Z M, Wang C X, Chen H D. Enhancement of Light Extraction of LED by Photonic Crystal Structures[J]. Chin. J. Semicond., 2006, 27(5): 921.

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Received: 20 August 2015 Revised: Online: Published: 01 May 2006

The band structure of a 2D infinite photonic crystal is calculated using the FDTD method.Slab photonic crystals with InP are fabricated.Two fabrication methods--one using only PMMA as mask and one using PMMA and SiO2 as masks are used.The results show that the first method cannot yield an accurate pattern transfer,while the other method can.The extraction efficiency in an LED is enhanced successfully by use of the photonic crystal.The light extraction efficiency of the LED with the photonic crystal structure is twice as high as that of the unprocessed sample under the same testing conditions.Along with the increase of lattice constant,the extraction efficiency also increases.

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