
PAPERS
Du Wei, Xu Xingsheng, Sun Zenghui, Lu Lin, Gao Junhua, Zhao Zhimin, Wang Chunxia and Chen Hongda
Abstract: The band structure of a 2D infinite photonic crystal is calculated using the FDTD method.Slab photonic crystals with InP are fabricated.Two fabrication methods--one using only PMMA as mask and one using PMMA and SiO2 as masks are used.The results show that the first method cannot yield an accurate pattern transfer,while the other method can.The extraction efficiency in an LED is enhanced successfully by use of the photonic crystal.The light extraction efficiency of the LED with the photonic crystal structure is twice as high as that of the unprocessed sample under the same testing conditions.Along with the increase of lattice constant,the extraction efficiency also increases.
Key words: photonic crystal, electron beam lithography, RIE, LED extraction efficiency
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Article views: 3238 Times PDF downloads: 2400 Times Cited by: 0 Times
Received: 20 August 2015 Revised: Online: Published: 01 May 2006
Citation: |
Du Wei, Xu Xingsheng, Sun Zenghui, Lu Lin, Gao Junhua, Zhao Zhimin, Wang Chunxia, Chen Hongda. Enhancement of Light Extraction of LED by Photonic Crystal Structures[J]. Journal of Semiconductors, 2006, 27(5): 921-925.
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Du W, Xu X S, Sun Z H, Lu L, Gao J H, Zhao Z M, Wang C X, Chen H D. Enhancement of Light Extraction of LED by Photonic Crystal Structures[J]. Chin. J. Semicond., 2006, 27(5): 921.
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