Chin. J. Semicond. > 2003, Volume 24 > Issue 3 > 307-311
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背面Ar~+轰击对n-MOSFET低频噪声的影响

黄美浅 , 李观启 , 李斌 and 曾绍鸿

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Key words: 背面Ar+轰击, 低频噪声, 迁移率, 界面态

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    Received: 20 August 2015 Revised: Online: Published: 01 March 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(3): 307-311
      黄美浅, 李观启, 李斌, 曾绍鸿. 背面Ar~+轰击对n-MOSFET低频噪声的影响[J]. 半导体学报(英文版), 2003, 24(3): 307-311.
      Citation:
      黄美浅, 李观启, 李斌, 曾绍鸿. 背面Ar~+轰击对n-MOSFET低频噪声的影响[J]. 半导体学报(英文版), 2003, 24(3): 307-311.
      shu

      • Received Date: 2015-08-20

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