Chin. J. Semicond. > 1982, Volume 3 > Issue 1 > 76-79
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硅中离子注入层光学常数的振荡分布

钱佑华 , 陈良尧 and 张继昌

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    Received: 20 August 2015 Revised: Online: Published: 01 January 1982

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      Article Navigation >  Journal of Semiconductors  > 1982  >  3(1): 76-79
      钱佑华, 陈良尧, 张继昌. 硅中离子注入层光学常数的振荡分布[J]. 半导体学报(英文版), 1982, 3(1): 76-79.
      Citation:
      钱佑华, 陈良尧, 张继昌. 硅中离子注入层光学常数的振荡分布[J]. 半导体学报(英文版), 1982, 3(1): 76-79.
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      • Received Date: 2015-08-20

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