Chin. J. Semicond. > 2003, Volume 24 > Issue 1 > 1-5

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固体源化学气相沉积生长c轴平行于衬底的ZnO薄膜(英文)

吕建国 , 叶志镇 , 张银珠 , 黄靖云 and 赵炳辉

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Key words: ZnO薄膜, 固体源化学气相沉积, 混合取向, c轴平行于衬底

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    Received: 20 August 2015 Revised: Online: Published: 01 January 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(1): 1-5
      吕建国, 叶志镇, 张银珠, 黄靖云, 赵炳辉. 固体源化学气相沉积生长c轴平行于衬底的ZnO薄膜(英文)[J]. 半导体学报(英文版), 2003, 24(1): 1-5.
      Citation:
      吕建国, 叶志镇, 张银珠, 黄靖云, 赵炳辉. 固体源化学气相沉积生长c轴平行于衬底的ZnO薄膜(英文)[J]. 半导体学报(英文版), 2003, 24(1): 1-5.
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      • Received Date: 2015-08-20

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