Chin. J. Semicond. > 2005, Volume 26 > Issue 8 > 1671-1675
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基于元胞自动机理论的硅各向异性腐蚀模型

陈杰智 , 李泠 , 施毅 , 刘明 and 郑有炓

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Key words: 元胞自动机, 各向异性腐蚀, 碰撞理论

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    Received: 18 August 2015 Revised: Online: Published: 01 August 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(8): 1671-1675
      陈杰智, 李泠, 施毅, 刘明, 郑有炓. 基于元胞自动机理论的硅各向异性腐蚀模型[J]. 半导体学报(英文版), 2005, 26(8): 1671-1675.
      Citation:
      陈杰智, 李泠, 施毅, 刘明, 郑有炓. 基于元胞自动机理论的硅各向异性腐蚀模型[J]. 半导体学报(英文版), 2005, 26(8): 1671-1675.
      shu

      • Received Date: 2015-08-18

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