Chin. J. Semicond. > 1999, Volume 20 > Issue 12 > 1071-1074
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O76mm智能剥离SOI材料的制备及其表面缺陷的分析

竺士炀 , 黄宜平 , 李爱珍 , 吴东平 , 王瑾 , 茹国平 and 包宗明

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    Received: 19 August 2015 Revised: Online: Published: 01 December 1999

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      Article Navigation >  Journal of Semiconductors  > 1999  >  20(12): 1071-1074
      竺士炀, 黄宜平, 李爱珍, 吴东平, 王瑾, 茹国平, 包宗明. O76mm智能剥离SOI材料的制备及其表面缺陷的分析[J]. 半导体学报(英文版), 1999, 20(12): 1071-1074.
      Citation:
      竺士炀, 黄宜平, 李爱珍, 吴东平, 王瑾, 茹国平, 包宗明. O76mm智能剥离SOI材料的制备及其表面缺陷的分析[J]. 半导体学报(英文版), 1999, 20(12): 1071-1074.
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      • Received Date: 2015-08-19

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