Chin. J. Semicond. > 1991, Volume 12 > Issue 11 > 700-704
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多晶硅/CoSi_2/Si结构热稳定性研究

陈维德 , 金高龙 , 崔玉德 and 许振嘉

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1991

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      Article Navigation >  Journal of Semiconductors  > 1991  >  12(11): 700-704
      陈维德, 金高龙, 崔玉德, 许振嘉. 多晶硅/CoSi_2/Si结构热稳定性研究[J]. 半导体学报(英文版), 1991, 12(11): 700-704.
      Citation:
      陈维德, 金高龙, 崔玉德, 许振嘉. 多晶硅/CoSi_2/Si结构热稳定性研究[J]. 半导体学报(英文版), 1991, 12(11): 700-704.
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      • Received Date: 2015-08-19

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