Chin. J. Semicond. > 2003, Volume 24 > Issue S1 > 47-50

Thermal Characteristics of silicon nitride Thin membrane

Song Qinglin, Xia Shanhong, Chen Shaofeng and Zhang Jiangang

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Abstract: For researching on the thermal characteristics of silicon nitride thin membrane such as heat capacity, radiation, convection, and so on, a kind of floating membrane is designed. And thermal transfer mechanism of the floating membrane is analyzed. Si3N4 floating membranes with different areas and thicknesses are fabricated by Using micro-fabrication techniques, and their several thermal parameters of them are obtained from experiments.

Key words: thermal characteristics heat capacity floating membrane

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    Received: 16 March 2016 Revised: Online: Published: 01 January 2003

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      Song Qinglin, Xia Shanhong, Chen Shaofeng, Zhang Jiangang. Thermal Characteristics of silicon nitride Thin membrane[J]. Journal of Semiconductors, 2003, 24(S1): 47-50. ****Song Q L, Xia S H, Chen S F, Zhang J G. Thermal Characteristics of silicon nitride Thin membrane[J]. Chin. J. Semicond., 2003, 24(S1): 47.
      Citation:
      Song Qinglin, Xia Shanhong, Chen Shaofeng, Zhang Jiangang. Thermal Characteristics of silicon nitride Thin membrane[J]. Journal of Semiconductors, 2003, 24(S1): 47-50. ****
      Song Q L, Xia S H, Chen S F, Zhang J G. Thermal Characteristics of silicon nitride Thin membrane[J]. Chin. J. Semicond., 2003, 24(S1): 47.

      Thermal Characteristics of silicon nitride Thin membrane

      • Received Date: 2016-03-16
      • Published Date: 2016-03-15

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