Chin. J. Semicond. > 2003, Volume 24 > Issue 6 > 649-655
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板上芯片固化后残余应力分布的有限元模拟

黄卫东 , 孙志国 , 彩霞 , 罗乐 and 程兆年

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Key words: 板上芯片, 残余应力, 有限元模拟, 硅压阻传感器

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    Received: 20 August 2015 Revised: Online: Published: 01 June 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(6): 649-655
      黄卫东, 孙志国, 彩霞, 罗乐, 程兆年. 板上芯片固化后残余应力分布的有限元模拟[J]. 半导体学报(英文版), 2003, 24(6): 649-655.
      Citation:
      黄卫东, 孙志国, 彩霞, 罗乐, 程兆年. 板上芯片固化后残余应力分布的有限元模拟[J]. 半导体学报(英文版), 2003, 24(6): 649-655.
      shu

      • Received Date: 2015-08-20

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