Chin. J. Semicond. > 1991, Volume 12 > Issue 1 > 62-64

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低温等离子体反应沉积ITO膜的研究

贾永新 , 杨志平 , 谢晓阳 and 李志强

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    Received: 19 August 2015 Revised: Online: Published: 01 January 1991

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      Article Navigation >  Journal of Semiconductors  > 1991  >  12(1): 62-64
      贾永新, 杨志平, 谢晓阳, 李志强. 低温等离子体反应沉积ITO膜的研究[J]. 半导体学报(英文版), 1991, 12(1): 62-64.
      Citation:
      贾永新, 杨志平, 谢晓阳, 李志强. 低温等离子体反应沉积ITO膜的研究[J]. 半导体学报(英文版), 1991, 12(1): 62-64.
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      • Received Date: 2015-08-19

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