Chin. J. Semicond. > 2005, Volume 26 > Issue 7 > 1442-1447
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一种K波段双桥电容式RF MEMS开关的设计与制作

雷啸锋 , 刘泽文 , 宣云 , 韦嘉 , 李志坚 and 刘理天

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Key words: RF MEMS, 开关, 双桥结构, 高隔离度

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    Received: 18 August 2015 Revised: Online: Published: 01 July 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(7): 1442-1447
      雷啸锋, 刘泽文, 宣云, 韦嘉, 李志坚, 刘理天. 一种K波段双桥电容式RF MEMS开关的设计与制作[J]. 半导体学报(英文版), 2005, 26(7): 1442-1447.
      Citation:
      雷啸锋, 刘泽文, 宣云, 韦嘉, 李志坚, 刘理天. 一种K波段双桥电容式RF MEMS开关的设计与制作[J]. 半导体学报(英文版), 2005, 26(7): 1442-1447.
      shu

      • Received Date: 2015-08-18

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