Chin. J. Semicond. > 2005, Volume 26 > Issue 10 > 2032-2037
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表征ULSI低介电常数互连材料机械特性的表面波频散特性

李志国 , 肖夏 , 张鑫慧 and 姚素英

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Key words: 低介电常数介质, 表面波, 频散特性, 杨氏模量

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    Received: 19 August 2015 Revised: Online: Published: 01 October 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(10): 2032-2037
      李志国, 肖夏, 张鑫慧, 姚素英. 表征ULSI低介电常数互连材料机械特性的表面波频散特性[J]. 半导体学报(英文版), 2005, 26(10): 2032-2037.
      Citation:
      李志国, 肖夏, 张鑫慧, 姚素英. 表征ULSI低介电常数互连材料机械特性的表面波频散特性[J]. 半导体学报(英文版), 2005, 26(10): 2032-2037.
      shu

      • Received Date: 2015-08-19

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