Chin. J. Semicond. > 1990, Volume 11 > Issue 7 > 539-545

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    Received: 19 August 2015 Revised: Online: Published: 01 July 1990

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      鲍希茂, 华雪梅. 预非晶化硅中注入硼的异常扩散[J]. 半导体学报(英文版), 1990, 11(7): 539-545.
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      鲍希茂, 华雪梅. 预非晶化硅中注入硼的异常扩散[J]. 半导体学报(英文版), 1990, 11(7): 539-545.

      • Received Date: 2015-08-19

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