Chin. J. Semicond. > 2003, Volume 24 > Issue 2 > 157-160
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射频磁控溅射ZnO薄膜的光致发光

王卿璞 , 张德恒 and 薛忠营

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Key words: ZnO薄膜, 射频磁控溅射, Si衬底, 光致发光

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    Received: 20 August 2015 Revised: Online: Published: 01 February 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(2): 157-160
      王卿璞, 张德恒, 薛忠营. 射频磁控溅射ZnO薄膜的光致发光[J]. 半导体学报(英文版), 2003, 24(2): 157-160.
      Citation:
      王卿璞, 张德恒, 薛忠营. 射频磁控溅射ZnO薄膜的光致发光[J]. 半导体学报(英文版), 2003, 24(2): 157-160.
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      • Received Date: 2015-08-20

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