Chin. J. Semicond. > 1998, Volume 19 > Issue 4 > 299-303
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用显微喇曼扫描成像(mapping)法测集成电路中CoSi_2电极引起的应力

李碧波 , 黄福敏 , 张树霖 , 高玉芝 and 张利春

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    Received: 20 August 2015 Revised: Online: Published: 01 April 1998

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      Article Navigation >  Journal of Semiconductors  > 1998  >  19(4): 299-303
      李碧波, 黄福敏, 张树霖, 高玉芝, 张利春. 用显微喇曼扫描成像(mapping)法测集成电路中CoSi_2电极引起的应力[J]. 半导体学报(英文版), 1998, 19(4): 299-303.
      Citation:
      李碧波, 黄福敏, 张树霖, 高玉芝, 张利春. 用显微喇曼扫描成像(mapping)法测集成电路中CoSi_2电极引起的应力[J]. 半导体学报(英文版), 1998, 19(4): 299-303.
      shu

      • Received Date: 2015-08-20

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