Chin. J. Semicond. > 2002, Volume 23 > Issue 4 > 399-402
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窄条宽MOCVD选区生长InP系材料的速率增强因子

张瑞英 , 董杰 , 周帆 , 冯志伟 , 边静 and 王圩

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Key words: 窄条宽选区生长, MOCVD, InP系材料, 速率增强因子

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(4): 399-402
      张瑞英, 董杰, 周帆, 冯志伟, 边静, 王圩. 窄条宽MOCVD选区生长InP系材料的速率增强因子[J]. 半导体学报(英文版), 2002, 23(4): 399-402.
      Citation:
      张瑞英, 董杰, 周帆, 冯志伟, 边静, 王圩. 窄条宽MOCVD选区生长InP系材料的速率增强因子[J]. 半导体学报(英文版), 2002, 23(4): 399-402.
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      • Received Date: 2015-08-19

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