Chin. J. Semicond. > 2000, Volume 21 > Issue 6 > 570-575
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在Si(111)上脉冲ArF准分子激光淀积晶态定向α-SiC薄膜

王玉霞 , 温军 , 郭震 , 汤洪高 , 黄继颇 , 王连卫 and 林成鲁

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Key words: 激光淀积, α-SiC薄膜

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    Received: 20 August 2015 Revised: Online: Published: 01 June 2000

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      Article Navigation >  Journal of Semiconductors  > 2000  >  21(6): 570-575
      王玉霞, 温军, 郭震, 汤洪高, 黄继颇, 王连卫, 林成鲁. 在Si(111)上脉冲ArF准分子激光淀积晶态定向α-SiC薄膜[J]. 半导体学报(英文版), 2000, 21(6): 570-575.
      Citation:
      王玉霞, 温军, 郭震, 汤洪高, 黄继颇, 王连卫, 林成鲁. 在Si(111)上脉冲ArF准分子激光淀积晶态定向α-SiC薄膜[J]. 半导体学报(英文版), 2000, 21(6): 570-575.
      shu

      • Received Date: 2015-08-20

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