Chin. J. Semicond. > 2005, Volume 26 > Issue 7 > 1448-1453
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MOEMS光开关动力学过程分析

孙东明 , 董玮 , 郭文滨 , 刘彩霞 , 王国东 , 徐宝琨 and 陈维友

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Key words: MOEMS, 动力学分析, 角速度, 倾斜下电极

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    Received: 18 August 2015 Revised: Online: Published: 01 July 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(7): 1448-1453
      孙东明, 董玮, 郭文滨, 刘彩霞, 王国东, 徐宝琨, 陈维友. MOEMS光开关动力学过程分析[J]. 半导体学报(英文版), 2005, 26(7): 1448-1453.
      Citation:
      孙东明, 董玮, 郭文滨, 刘彩霞, 王国东, 徐宝琨, 陈维友. MOEMS光开关动力学过程分析[J]. 半导体学报(英文版), 2005, 26(7): 1448-1453.
      shu

      • Received Date: 2015-08-18

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