Chin. J. Semicond. > 2001, Volume 22 > Issue 12 > 1519-1524
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Monte Carlo方法模拟低能电子束曝光电子散射轨迹

任黎明 and 陈宝钦

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Key words: 电子束曝光, Monte Carlo方法, 低能电子散射

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    Received: 20 August 2015 Revised: Online: Published: 01 December 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(12): 1519-1524
      任黎明, 陈宝钦. Monte Carlo方法模拟低能电子束曝光电子散射轨迹[J]. 半导体学报(英文版), 2001, 22(12): 1519-1524.
      Citation:
      任黎明, 陈宝钦. Monte Carlo方法模拟低能电子束曝光电子散射轨迹[J]. 半导体学报(英文版), 2001, 22(12): 1519-1524.
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      • Received Date: 2015-08-20

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