Chin. J. Semicond. > 2002, Volume 23 > Issue 12 > 1298-1302
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微型电磁继电器的制作和仿真分析(英文)

张宇峰 and 李德胜

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Key words: 微型电磁继电器, MEMS, 微加工技术, 平面线圈, 双支撑悬臂梁

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    Received: 19 August 2015 Revised: Online: Published: 01 December 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(12): 1298-1302
      张宇峰, 李德胜. 微型电磁继电器的制作和仿真分析(英文)[J]. 半导体学报(英文版), 2002, 23(12): 1298-1302.
      Citation:
      张宇峰, 李德胜. 微型电磁继电器的制作和仿真分析(英文)[J]. 半导体学报(英文版), 2002, 23(12): 1298-1302.
      shu

      • Received Date: 2015-08-19

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