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Application of Two Thermal Actuators in Miniature Electric Field Sensors

Ye Chao, Chen Xianxiang, Peng Chunrong, Tao Hu and Xia Shanhong

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Abstract: This paper presents two novel miniature electrostatic field sensors with thermal actuators,one of which uses a chevron actuator array and the other of which uses amplification-compliant micro-transmission.A test system with a lock-in amplifier is constructed to detect the output signal of the sensor.The test results show that both of the two sensors respond to an external electric field linearly,but the sensor with amplification-compliant micro-transmissions has higher sensitivity.

Key words: thermal actuator, chevron actuator array, amplification compliant micro-transmission, electric field sensor

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    Received: 18 August 2015 Revised: 12 April 2006 Online: Published: 01 September 2006

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      Article Navigation >  Journal of Semiconductors  > 2006  >  27(9): 1672-1675
      Ye Chao, Chen Xianxiang, Peng Chunrong, Tao Hu, Xia Shanhong. Application of Two Thermal Actuators in Miniature Electric Field Sensors[J]. Journal of Semiconductors, 2006, 27(9): 1672-1675. ****Ye C, Chen X X, Peng C R, Tao H, Xia S H. Application of Two Thermal Actuators in Miniature Electric Field Sensors[J]. Chin. J. Semicond., 2006, 27(9): 1672.
      Citation:
      Ye Chao, Chen Xianxiang, Peng Chunrong, Tao Hu, Xia Shanhong. Application of Two Thermal Actuators in Miniature Electric Field Sensors[J]. Journal of Semiconductors, 2006, 27(9): 1672-1675. ****
      Ye C, Chen X X, Peng C R, Tao H, Xia S H. Application of Two Thermal Actuators in Miniature Electric Field Sensors[J]. Chin. J. Semicond., 2006, 27(9): 1672.
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      Application of Two Thermal Actuators in Miniature Electric Field Sensors

      • State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100080,China

      • Graduate University of Chinese Academy of Sciences,Beijing 100039,China

      • State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100080,China

      • Graduate University of Chinese Academy of Sciences,Beijing 100039,China

      • State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100080,China

      • Graduate University of Chinese Academy of Sciences,Beijing 100039,China

      • State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100080,China

      • Graduate University of Chinese Academy of Sciences,Beijing 100039,China

      • State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100080,China

      • Received Date: 2015-08-18
      • Accepted Date: 2006-01-17
      • Revised Date: 2006-04-12
      • Published Date: 2006-10-12

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