Chin. J. Semicond. > 2000, Volume 21 > Issue 6 > 521-528

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薄层SOS薄膜材料外延生长及其器件应用(英文)

王启元 , 聂纪平 , 刘忠立 and 郁元桓

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Key words: 硅, 外延生长, 固相外延

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    Received: 20 August 2015 Revised: Online: Published: 01 June 2000

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      Article Navigation >  Journal of Semiconductors  > 2000  >  21(6): 521-528
      王启元, 聂纪平, 刘忠立, 郁元桓. 薄层SOS薄膜材料外延生长及其器件应用(英文)[J]. 半导体学报(英文版), 2000, 21(6): 521-528.
      Citation:
      王启元, 聂纪平, 刘忠立, 郁元桓. 薄层SOS薄膜材料外延生长及其器件应用(英文)[J]. 半导体学报(英文版), 2000, 21(6): 521-528.
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      • Received Date: 2015-08-20

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