Chin. J. Semicond. > 2003, Volume 24 > Issue 10 > 1025-1029
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湿法腐蚀制备的SOI光波导(英文)

王小龙 , 严清峰 , 刘敬伟 , 陈少武 and 余金中

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Key words: SOI, 湿法腐蚀, 多模干涉, 单模波导

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    Received: 20 August 2015 Revised: Online: Published: 01 October 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(10): 1025-1029
      王小龙, 严清峰, 刘敬伟, 陈少武, 余金中. 湿法腐蚀制备的SOI光波导(英文)[J]. 半导体学报(英文版), 2003, 24(10): 1025-1029.
      Citation:
      王小龙, 严清峰, 刘敬伟, 陈少武, 余金中. 湿法腐蚀制备的SOI光波导(英文)[J]. 半导体学报(英文版), 2003, 24(10): 1025-1029.
      shu

      • Received Date: 2015-08-20

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