Chin. J. Semicond. > 2002, Volume 23 > Issue 3 > 246-250
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硅单电子晶体管的制造及特性(英文)

卢刚 , 陈治明 , 王建农 and 葛惟昆

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Key words: 单电子晶体管, 库仑阻塞, 单电子隧穿, 量子点, 电子束光刻技术

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    Received: 19 August 2015 Revised: Online: Published: 01 March 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(3): 246-250
      卢刚, 陈治明, 王建农, 葛惟昆. 硅单电子晶体管的制造及特性(英文)[J]. 半导体学报(英文版), 2002, 23(3): 246-250.
      Citation:
      卢刚, 陈治明, 王建农, 葛惟昆. 硅单电子晶体管的制造及特性(英文)[J]. 半导体学报(英文版), 2002, 23(3): 246-250.
      shu

      • Received Date: 2015-08-19

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